Title :
Fabrication process design for complementary metal-cytop-organic-semiconductor integrated circuits
Author :
Choi, Edward ; Ozgun, Recep ; Dhar, Bal M. ; Katz, Howard ; Andreou, Andreas G.
Author_Institution :
Electr. & Comput. Eng., Johns Hopkins Univ., Baltimore, MD
Abstract :
We report on design flows for the fabrication process of n and p type organic transistors onto a single substrate that allows for the integration of integrated circuits. Our fabrication process employs Cytop as the gate dielectric and four different combinations of organic semiconductors. Two p type organic semiconductors were used, Pentacene and alpha-sexithiophene and two n type semiconductors were used, F15NTCDI (bis(pentadecafluorooctyl) naphthalenetetracarboxylic diimide) and F16CuPc (Hexadecafluorocopper phthalocyanine). Combining both p and n type organic semiconductors onto a single, interconnected substrate allows for CMOS digital circuits. Through use of a silicon insulating substrating, individual transistors with separate contacts for gate, drain and source can be fabricated allowing for the development of hybrid silicon/organic integrated circuits. Experimental results from fabricated devices and simple circuits are reported.
Keywords :
CMOS digital integrated circuits; electrical contacts; elemental semiconductors; hybrid integrated circuits; organic semiconductors; silicon; CMOS digital circuits; alpha-sexithiophene; bis(pentadecafluorooctyl) naphthalenetetracarboxylic diimide; complementary metal-Cytop-organic-semiconductor integrated circuits; gate dielectrics; hexadecafluorocopper phthalocyanine; hybrid silicon-organic integrated circuits; individual transistor contacts; interconnected substrate; n-type organic transistors; n-type semiconductors; p-type organic semiconductors; p-type organic transistors; pentacene; silicon insulating transistors; CMOS digital integrated circuits; Dielectric substrates; Digital circuits; Fabrication; Insulation; Integrated circuit interconnections; Organic semiconductors; Pentacene; Process design; Silicon;
Conference_Titel :
Micro-Nanoelectronics, Technology and Applications, 2008. EAMTA 2008. Argentine School of
Conference_Location :
Buenos Aires
Print_ISBN :
978-987-655-003-1
Electronic_ISBN :
978-987-655-003-1