DocumentCode :
477282
Title :
Variation of the discharge characteristics with the ion mass in a capacitive coupled RF plasma
Author :
Cetiner, Selma O. ; Veitzer, Seth ; Stoltz, Peter
Author_Institution :
Tech-X Corporation, 5621 Arapahoe Ave Suite A, Boulder CO 80303, USA
Volume :
1
fYear :
2007
fDate :
17-22 June 2007
Firstpage :
509
Lastpage :
510
Abstract :
The properties of the particle flux in a multiple species plasma at the sheath boundary for both collisionless and collisional discharges is investigated through a computational experiment using the kinetic particle-in-cell code OOPIC Pro. A knowledge of the ion fluxes at the sheath entrance can be utilized in many systems including the determination of the plasma properties from Langmuir probe data and the calculation of surface quantities that depend on the ion flux such as the sputtering yield. It is shown that the different ion masses influence the relative concentrations of each species and play an important role in determining the velocity ratios using two-component mixtures of hydrogen, helium and argon.
Keywords :
Argon; Helium; Hydrogen; Kinetic theory; Plasma properties; Plasma sheaths; Probes; Radio frequency; Sputtering; Surface discharges;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Pulsed Power Conference, 2007 16th IEEE International
Conference_Location :
Albuquerque, NM
Print_ISBN :
978-1-4244-0913-6
Electronic_ISBN :
978-1-4244-0914-3
Type :
conf
DOI :
10.1109/PPPS.2007.4651892
Filename :
4651892
Link To Document :
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