DocumentCode
47772
Title
Effect of Undercut Etch on Performance and Fabrication Robustness of Metal-Clad Semiconductor Nanolasers
Author
Shane, J. ; Qing Gu ; Potterton, A. ; Fainman, Y.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of California at San Diego, La Jolla, CA, USA
Volume
51
Issue
1
fYear
2015
fDate
Jan. 2015
Firstpage
1
Lastpage
9
Abstract
We use optical, thermal, and electrical simulation to evaluate the effects of using varying amounts of undercut etch on wavelength-scale and subwavelength metal-clad semiconductor nanolasers (MCSELs). We find that as MCSEL diameter decreases, the optical performance becomes more sensitive to slight amounts of sidewall tilt. A modest amount of undercut (25%) dramatically improves the optical performance, reducing modal threshold gain to 100 cm-1 or less for lasers with core radius of 225, 550, or 775 nm, even in the presence of significant sidewall tilt (20° gain sidewall or ±8° pedestal sidewall tilt). Finally, we examine the effects of the increased undercut on nanolaser thermal performance and find that the increased resistive heating is insignificant near threshold, even for subwavelength nanolasers.
Keywords
nanofabrication; nanophotonics; optical fabrication; semiconductor lasers; We find that as MCSEL fabrication; electrical simulation; metal-clad semiconductor nanolasers; optical simulation; radius 225 nm; radius 550 nm; radius 775 nm; resistive heating; subwavelength MCSEL fabrication; thermal simulation; undercut etch effect; wavelength-scale; Bismuth; Gold; Indium gallium arsenide; Indium phosphide; Microwave integrated circuits; Silver; Substrates; Semiconductor lasers; design optimization; nanofabrication; nanoscale devices; thermal management;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.2014.2371851
Filename
6962890
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