The basic study on USM & ECM combined micro-machining

The characteristics of MEMS (Micro-electro-mechanical System) are presented. Micro-machining technology, especially micro-USM (ultrasonic machining) and micro-ECM (electrochemical machining) are introduced. A new micro-machining technology for MEMS components — USM & ECM combined micro-machining method is advanced. By the study, the great blast wave and negative pressure effect of ultrasonic frequency vibrating can remove the anode electrolytic passivation membranes produced in micro electrical current density. Micro-ECM can do continuously, so USM & ECM combined micro machining can be realized. Micro-cathode manufacturing technology is studied too. A few kind micro-cathodes with different sections are made by combined electro-discharge micro machining. The USM & ECM combined micro-machining system is built, which machining parameters can be adjusted in a wide ranges. A series of micro-machining basic tests are carried out. The possibility and the technology advantages about USM & ECM combined micro machining have been proved. The study is helpful for improving micro-machining technology and manufacturing MEMS components.