Analysis for performance of a vibratory micromachined gyroscope based on modeacceleration method

In the study of robust design of the performance of the micromachined gyroscope, in order to solve the problems concerning to the high precision and the computing time of performance analysis of micromachined gyroscope, a tuning fork vibratory micromachined gyroscope fabricated by the bulk silicon micromachining technology has been studied. The dynamic analysis method of the microstructure based on the substruturing method has been introduced, and on the basis of having realized the analysis of the micromachined gyroscope with the high degree accuracy, the optimum design of the micromachined gyroscope elastic bars has been carried out. Elastic bar of micromachined gyroscope with excellent performance is obtained. The analysis results not only show the validity of the dynamic analysis method of microstructure based on substruturing method, but also verify the potential values in the design of micromachined gyroscope performance.