Study on modeling and detection capacitance analysis method of micromachined gyroscope

To establish the mechanism model of fabrication defect to the performance of the micromachined gyroscope with high precision and solve the time-consuming problem of the structure analysis, a tuning fork vibratory microgyroscope fabricated by the bulk silicon micromachining technology is studied in this work. The detection capacitance analysis method based on a substructuring model for the microgyroscope is presented using the dynamic finite element theory of multi-degree of freedom to improve the analytical accuracy. The analysis of the final output characteristics, namely the dynamic characteristics of the detection capacitance of the microgyroscope, is accomplished. The analysis results indicate that the substructuring model can help to conduct the analysis with a reasonable accuracy and a reduced computational cost, and the fabrication errors of the microgyroscope influence the natural frequency little but influence the output of detection capacitance greatly. Based on the promotion of analysis accuracy and efficiency, some complicated engineering objectives for the microgyroscope, such as the expression of multiphysics environment, the design of structural topology and the simulation of intricate dynamic performance can be achieved.