Title :
Basic examination on simultaneous optimization of mechanism and control for high precision single axis stage and experimental verification
Author :
Hara, Atsushi ; Saiki, Kazuaki ; Sakata, Koichi ; Fujimoto, Hiroshi
Author_Institution :
Nikon Corp., Yokohama
Abstract :
In this paper, simultaneous optimization of mechanism and control is discussed for a high precision stage. We pay attention to zeros of a continuous-time plant, and the relationship between a sensor and zero positions has been clarified. In addition, it has been shown that similar relations are provided in structural change of a plant. After the zero position desired for a control system is shown, the vibration suppression PTC (Perfect Tracking Control) is applied to the plant with that condition. Finally, the effectiveness of proposed methods are verified by a simulation and an experiment.
Keywords :
continuous time systems; manufacturing systems; optimisation; precision engineering; vibration control; continuous-time plant; control system; experimental verification; high precision single axis stage; perfect tracking control; simultaneous optimization; vibration suppression PTC; Actuators; Control systems; Design methodology; Design optimization; Force measurement; Laplace equations; Magnetic resonance; Springs; Telephony; Vibration control;
Conference_Titel :
Industrial Electronics, 2008. IECON 2008. 34th Annual Conference of IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4244-1767-4
Electronic_ISBN :
1553-572X
DOI :
10.1109/IECON.2008.4758351
