Study on performances of novel electromagnetic drive micromanipulator

A novel micromanipulator was proposed for the implementation of superprecise manufacture. There were Halbach permanent magnet matrixes attached on the sides and bottom of the carrier, while cross-cut air-core coils mounted on the fixed parts correspondingly. The carrier was driven directly in 6-degree of freedom by the magnetic repulsive force generated from the permanent magnets and coils, and the local electromagnetic fields and forces could be changed by switch on-off and amplitude of the coils current. This work introduced the construction and operating principle of the system. The magnetic field and force characteristics were analyzed thoroughly by three-dimensional (3D) finite element method (FEM). The conclusions can supply a good theoretical base for the design and control of the micromanipulation system, and the experiment curve proves the FEM results are accurate.