DocumentCode
483359
Title
Static control standards in the semiconductor industry
Author
Steinman, Arnold ; Noras, Maciej
Author_Institution
Ion Syst., Alameda, CA, USA
fYear
2008
fDate
7-11 Sept. 2008
Firstpage
142
Lastpage
147
Abstract
Several worldwide organizations create standards for controlling static charge in the semiconductor industry. The ESD Association focuses on device testing, evaluation of static control methods, and static control program development. SEMI and the International Technology Roadmap for Semiconductors (ITRS) create standards and specify acceptable levels of static charge in semiconductor manufacturing.
Keywords
semiconductor technology; device testing; semiconductor industry; semiconductor manufacturing; static charge; static control standards; Control systems; Electronics industry; Electrostatic discharge; Electrostatic interference; Manufacturing processes; Packaging; Semiconductor device manufacture; Semiconductor materials; Standards organizations; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
Conference_Location
Tucson, AZ
Print_ISBN
978-1-58537-146-4
Electronic_ISBN
978-1-58537-147-1
Type
conf
Filename
4772126
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