Title :
Static control standards in the semiconductor industry
Author :
Steinman, Arnold ; Noras, Maciej
Author_Institution :
Ion Syst., Alameda, CA, USA
Abstract :
Several worldwide organizations create standards for controlling static charge in the semiconductor industry. The ESD Association focuses on device testing, evaluation of static control methods, and static control program development. SEMI and the International Technology Roadmap for Semiconductors (ITRS) create standards and specify acceptable levels of static charge in semiconductor manufacturing.
Keywords :
semiconductor technology; device testing; semiconductor industry; semiconductor manufacturing; static charge; static control standards; Control systems; Electronics industry; Electrostatic discharge; Electrostatic interference; Manufacturing processes; Packaging; Semiconductor device manufacture; Semiconductor materials; Standards organizations; Testing;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-58537-146-4
Electronic_ISBN :
978-1-58537-147-1
