Title :
Novel 190V LIGBT-based ESD protection for 0.35μm Smart Power technology realized on SOI substrate
Author :
Gevinti, Eleonora ; Cerati, Lorenzo ; Sambi, Marco ; Dissegna, Mariano ; Cecchetto, Luca ; Andreini, Antonio ; Tazzoli, Augusto ; Meneghesso, Gaudenzio
Author_Institution :
STMicroelectron., Agrate Brianza
Abstract :
A novel ESD protection implementation based on LIGBT component is presented for 0.35 mum Smart Power HV devices on SOI substrate. A Single Stage LIGBT was designed, characterized and simulated. SOA boundaries are investigated in TLP regime. ESD performances improvements achieved using LIGBT devices are highlighted and a comparison with NDRIFTMOS-based active clamps is presented.
Keywords :
electrostatic discharge; insulated gate bipolar transistors; power integrated circuits; ESD protection; SOI substrate; Si; lateral insulated gate bipolar transistor; safe operating area boundaries; size 0.35 mum; smart power HV devices; voltage 190 V; CMOS technology; Clamps; Electrostatic discharge; Isolation technology; Performance analysis; Protection; Semiconductor optical amplifiers; Silicon on insulator technology; Thermal conductivity; Voltage;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-58537-146-4
Electronic_ISBN :
978-1-58537-147-1
