Title :
Analysis of charged device model (CDM) ESD in MEMS
Author :
Greason, William D.
Author_Institution :
Appl. Electrostatics Res. Centre, Univ. of Western Ontario, London, ON
Abstract :
The effect of charge injection due to CDM ESD in capacitive MEMS structures is analyzed. The results show that as feature size is reduced, ESD injected charge produces a change for the stiction effect which is inversely proportional to the square of the plate area and a change in the dielectric layer breakdown which is inversely proportional to the plate area. Charge and voltage modes in MEMS are also examined.
Keywords :
electric breakdown; electrostatic discharge; micromechanical devices; ESD; capacitive MEMS structures; charge injection effect; charged device model analysis; dielectric layer breakdown; plate area; voltage modes; Biological system modeling; Capacitance; Capacitors; Circuits; Conductors; Electrostatic analysis; Electrostatic discharge; Micromechanical devices; Packaging; Pins;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-58537-146-4
Electronic_ISBN :
978-1-58537-147-1
