DocumentCode
483387
Title
A2. controlling ESD in the modern cleanroom manufacturing environment (cleanrooms / ESD / ionization guidelines and considerations)
Author
Duncan, Kevin
Author_Institution
Seagate, USA
fYear
2008
fDate
7-11 Sept. 2008
Firstpage
340
Lastpage
340
Abstract
As devices become faster and feature sizes decrease, sensitivities to ESD and contamination increase. This workshop will focus on the roles that grounding methods, materials, cleanrooms and ionization play in controlling ESD and contamination in the modern cleanroom manufacturing environment. Several industry experts will share their experiences and will answer questions related to current ESD and Contamination control issues, such as selecting ESD and cleanroom safe materials, electrostatic attraction, the use of ionization and various other related topics.
Keywords
Contamination; Earth Observing System; Electrical equipment industry; Electrostatic discharge; Grounding; Guidelines; Industrial control; Ionization; Manufacturing industries; Size control;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
Conference_Location
Tucson, AZ, USA
Print_ISBN
978-1-58537-146-4
Electronic_ISBN
978-1-58537-147-1
Type
conf
Filename
4772154
Link To Document