DocumentCode :
483387
Title :
A2. controlling ESD in the modern cleanroom manufacturing environment (cleanrooms / ESD / ionization guidelines and considerations)
Author :
Duncan, Kevin
Author_Institution :
Seagate, USA
fYear :
2008
fDate :
7-11 Sept. 2008
Firstpage :
340
Lastpage :
340
Abstract :
As devices become faster and feature sizes decrease, sensitivities to ESD and contamination increase. This workshop will focus on the roles that grounding methods, materials, cleanrooms and ionization play in controlling ESD and contamination in the modern cleanroom manufacturing environment. Several industry experts will share their experiences and will answer questions related to current ESD and Contamination control issues, such as selecting ESD and cleanroom safe materials, electrostatic attraction, the use of ionization and various other related topics.
Keywords :
Contamination; Earth Observing System; Electrical equipment industry; Electrostatic discharge; Grounding; Guidelines; Industrial control; Ionization; Manufacturing industries; Size control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
Conference_Location :
Tucson, AZ, USA
Print_ISBN :
978-1-58537-146-4
Electronic_ISBN :
978-1-58537-147-1
Type :
conf
Filename :
4772154
Link To Document :
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