• DocumentCode
    483387
  • Title

    A2. controlling ESD in the modern cleanroom manufacturing environment (cleanrooms / ESD / ionization guidelines and considerations)

  • Author

    Duncan, Kevin

  • Author_Institution
    Seagate, USA
  • fYear
    2008
  • fDate
    7-11 Sept. 2008
  • Firstpage
    340
  • Lastpage
    340
  • Abstract
    As devices become faster and feature sizes decrease, sensitivities to ESD and contamination increase. This workshop will focus on the roles that grounding methods, materials, cleanrooms and ionization play in controlling ESD and contamination in the modern cleanroom manufacturing environment. Several industry experts will share their experiences and will answer questions related to current ESD and Contamination control issues, such as selecting ESD and cleanroom safe materials, electrostatic attraction, the use of ionization and various other related topics.
  • Keywords
    Contamination; Earth Observing System; Electrical equipment industry; Electrostatic discharge; Grounding; Guidelines; Industrial control; Ionization; Manufacturing industries; Size control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
  • Conference_Location
    Tucson, AZ, USA
  • Print_ISBN
    978-1-58537-146-4
  • Electronic_ISBN
    978-1-58537-147-1
  • Type

    conf

  • Filename
    4772154