Title :
Statistical Control of VLSI Fabrication Processes
Author :
Mozumder, P.K. ; Shyamsundar, C.R. ; Strojwas, A.J.
Author_Institution :
SRC-CMU Center for Computer-Aided Design, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213
Abstract :
This paper presents a methodology for statistical control of VLSI fabrication processes. After a brief description of the stochastic nature of VLSI manufacturing, theoretical foundations of the on-line control system and algorithms for implementing it are presented.
Keywords :
Circuits; Fabrication; Fluctuations; Performance evaluation; Process control; Production; Semiconductor device measurement; Silicon; Testing; Very large scale integration;
Conference_Titel :
American Control Conference, 1987
Conference_Location :
Minneapolis, MN, USA
