Title :
A Simple Adaptive Controller for an Oxidation Process
Author :
Tsakalis, Kostas S. ; Crouch, Peter E.
Author_Institution :
Department of Electrical Engineering, Center for Systems Science and Engineering, Arizona State University, Tempe, AZ 85287
Abstract :
In this note we discuss the application of adaptive controller design techniques in a manufacturing process. As an example, we consider the process of oxidation of silicon in dry oxygen. This process consists of a single batch step where silicon wafers are introduced in a chamber and are oxidized for a time period at high temperature. Our objective is to determine the oxidation time such that a prescribed oxide thickness is grown on the silicon.
Keywords :
Adaptive control; Control systems; Design engineering; Manufacturing processes; Oxidation; Programmable control; Silicon; Systems engineering and theory; Temperature; Uncertain systems;
Conference_Titel :
American Control Conference, 1992
Conference_Location :
Chicago, IL, USA
Print_ISBN :
0-7803-0210-9
