Title :
Preparation and Characteristic of Li14Zn(GeO4)4 Thin Films for Solid State Batteries
Author :
Ohtsuka, Hideaki ; Yamaji, Akihiko
Author_Institution :
Ibaraki Electrical Communication Laboratory, NTT., Tokai, Ibaraki-ken, 319-11, Japan
Abstract :
Lithium conductive solid electrolyte films are expected for all solid state lithium batteries. Li14Zn(GeO4)4 (LISICON) phase thin films have been prepared by r.f. sputtering and vacuum evaporation method with electron beam heating. The sputtered film surface is considerably rougher than the evaporated film surface. The conductivities of both LISICON films at 500 °C are 5 × 10-3 ¿-1 cm-1. The conductivity of the sputtered film is higher than that of the evaporated film below 500 °C.
Keywords :
Batteries; Conductive films; Conductivity; Electron beams; Heating; Lithium; Rough surfaces; Solid state circuits; Sputtering; Surface roughness;
Conference_Titel :
Telecommunications Energy Conference, 1983. INTELEC '83. Fifth International
Conference_Location :
Tokyo, Japan
