Adaptive TLS Approach for Nonlinearity Compensation in Laser Interferometer

Author

Lee, S.C. ; Heo, G.H. ; You, K.H.

Author_Institution

Sungkyunkwan Univ., Suwon

Volume

4

fYear

2008

fDate

13-15 Dec. 2008

Firstpage

38

Lastpage

43

Abstract

The heterodyne laser interferometer has been widely used in linear displacement and precise measurement field. However the periodic nonlinearity that arises from incomplete laser sources and nonideal optical components restricts the precise measurement at the nano-meter level. In this paper, the total least squares (TLS) algorithm which can obtain optimal compensation parameters of nonlinearity is introduced. Using the TLS algorithm, the nonlinearity error is reduced and the measurement data can be more stabilized. The effectiveness of TLS approach is verified through the comparison of the experimental results with those obtained by a capacitance displacement sensor.

Keywords

compensation; displacement measurement; least squares approximations; light interferometers; measurement by laser beam; adaptive TLS approach; capacitance displacement sensor; heterodyne laser interferometer; nanometer level; nonlinearity compensation; nonlinearity error; optimal compensation; total least squares algorithm; Frequency; Interferometric lithography; Laser modes; Laser theory; Least squares methods; Mirrors; Optical devices; Optical interferometry; Optical polarization; Semiconductor lasers; TLS; displacement measurement; laser interferometer; nonlinearity; optimal control;

fLanguage

English

Publisher

ieee

Conference_Titel

Future Generation Communication and Networking Symposia, 2008. FGCNS '08. Second International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-3430-5

Electronic_ISBN

978-0-7695-3546-3

Type

conf

DOI

10.1109/FGCNS.2008.127

Filename

4813603