Non-invasive direct probing for on-chip voltage measurement

Accurate on-chip voltage measurement using direct probing is proposed. Series resistors and probing pads with floated ground are fabricated on-chip, and high-frequency probes and a digital oscilloscope is utilized off the chip. Compensation procedure of the non-ideal frequency response of the probing system is defined to improve wideband fidelity. The proposed measurement technique is experimentally applied to obtaining switching noise waveform on the power-supply network of an output buffer circuit. The measurement also demonstrated that the probing system has very small impact on the device under measurement.