DocumentCode :
492937
Title :
Review of electrostatic driven micromirrors. Comparison of their rotation angle
Author :
Bychkovsky, Volodymyr ; Lobur, M.
Author_Institution :
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear :
2009
fDate :
24-28 Feb. 2009
Firstpage :
500
Lastpage :
503
Abstract :
Three types of micromirrors are overviewed.
Keywords :
electrostatics; micro-optomechanical devices; microactuators; micromirrors; reviews; thin film devices; CMOS MEMS mirror; analog micromirror; comb-drive actuators; electrostatics; thin-film materials; thin-film structures; two-axis electrothermal micromirror; Biomedical optical imaging; Electrostatics; Etching; Fingers; Micromirrors; Mirrors; Optical interferometry; Residual stresses; Silicon; Transistors; electronic device; graph; micromirror; scheme;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
CAD Systems in Microelectronics, 2009. CADSM 2009. 10th International Conference - The Experience of Designing and Application of
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-2191-05-9
Type :
conf
Filename :
4839895
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=492937
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