Title :
Microelectromechanical system design based on Si nanowires
Author :
Klimovskaya, Alla ; Ostrovskii, Ihor ; Khoverko, Yurii ; Nichkalo, Stepan
Abstract :
In this paper growth of Si nanowires by CVD method was studied. Electromechanical systems based on Si nanowires were designed.
Keywords :
elemental semiconductors; micromechanical devices; nanowires; silicon; CVD method; microelectromechanical system design; nanowires; Gold; Heating; Hydrogen; Microelectromechanical systems; Nanowires; Semiconductor films; Substrates; Temperature distribution; Temperature sensors; Wires; CVD method; Electomechanical system; nanowires;
Conference_Titel :
CAD Systems in Microelectronics, 2009. CADSM 2009. 10th International Conference - The Experience of Designing and Application of
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-2191-05-9
