DocumentCode
492940
Title
Automation design of typical MEMS accelerometer
Author
Melnyk, Mykhaylo ; Kernytskyy, A. ; Denysyuk, Pavlo
Author_Institution
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2009
fDate
24-28 Feb. 2009
Firstpage
509
Lastpage
510
Abstract
The method of rapid analysis of the typical MEMS-accelerometers in the ANSYS environment is presented in the work.
Keywords
accelerometers; electrical engineering computing; micromechanical devices; ANSYS environment; MEMS accelerometer; automation design; Acceleration; Accelerometers; Databases; Design automation; Geometry; Graphical user interfaces; Information analysis; Micromechanical devices; Production; Solid modeling; ANSYS; MEMS; accelerometer;
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics, 2009. CADSM 2009. 10th International Conference - The Experience of Designing and Application of
Conference_Location
Lviv-Polyana
Print_ISBN
978-966-2191-05-9
Type
conf
Filename
4839898
Link To Document