Title :
Using optimization procedures to calculate parameters of MEMS macromodels
Author :
Petrenko, Anatolii ; Ladogubets, V. ; Beznosyk, Oleksandr ; Finogenov, Oleksii
Author_Institution :
CAD Dept., NTUU, Kiev, Ukraine
Abstract :
The approaches to get a circuit equivalent of microelectromechanical systems´ (MEMS) mechanical components are considered. The usage of the circuit design software optimization procedures to adjust macromodels´ parameters obtained as a result of the source equivalent circuit reduction is suggested. An example is considered and the simulation results are given for the problem of finding eigenfrequencies of a beam. The recommendations to choose optimization methods are given.
Keywords :
eigenvalues and eigenfunctions; equivalent circuits; integrated circuit design; integrated circuit modelling; micromechanical devices; optimisation; ALLTED; ANSYS; MEMS mechanical components; circuit design software optimization procedures; circuit equivalent; eigenfrequencies; microelectromechanical systems; Analytical models; Circuit simulation; Circuit synthesis; Equations; Equivalent circuits; Finite element methods; Mathematical model; Microelectromechanical systems; Micromechanical devices; RLC circuits; ALLTED; ANSYS; MEMS; optimization; simulation;
Conference_Titel :
CAD Systems in Microelectronics, 2009. CADSM 2009. 10th International Conference - The Experience of Designing and Application of
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-2191-05-9
