Using optimization procedures to calculate parameters of MEMS macromodels

Author

Petrenko, Anatolii ; Ladogubets, V. ; Beznosyk, Oleksandr ; Finogenov, Oleksii

Author_Institution

CAD Dept., NTUU, Kiev, Ukraine

fYear

2009

fDate

24-28 Feb. 2009

Firstpage

511

Lastpage

514

Abstract

The approaches to get a circuit equivalent of microelectromechanical systems´ (MEMS) mechanical components are considered. The usage of the circuit design software optimization procedures to adjust macromodels´ parameters obtained as a result of the source equivalent circuit reduction is suggested. An example is considered and the simulation results are given for the problem of finding eigenfrequencies of a beam. The recommendations to choose optimization methods are given.

Keywords

eigenvalues and eigenfunctions; equivalent circuits; integrated circuit design; integrated circuit modelling; micromechanical devices; optimisation; ALLTED; ANSYS; MEMS mechanical components; circuit design software optimization procedures; circuit equivalent; eigenfrequencies; microelectromechanical systems; Analytical models; Circuit simulation; Circuit synthesis; Equations; Equivalent circuits; Finite element methods; Mathematical model; Microelectromechanical systems; Micromechanical devices; RLC circuits; ALLTED; ANSYS; MEMS; optimization; simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

CAD Systems in Microelectronics, 2009. CADSM 2009. 10th International Conference - The Experience of Designing and Application of

Conference_Location

Lviv-Polyana

Print_ISBN

978-966-2191-05-9

Type

conf

Filename

4839899