Title :
Optimization model for output parameters of MEMS´s base elements of plate design
Author :
Teslyuk, Vasyl ; AlOmari, Tariq Ali ; Denysyuk, Pavlo ; Kernytskyy, A.
Author_Institution :
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
The optimization models of calculation of initial parameters of MEMS base elements of plate-shaped constructions are developed and presented.
Keywords :
micromechanical devices; MEMS; optimization model; output parameters; plate design; plate-shaped constructions; Biomembranes; CADCAM; Computer aided manufacturing; Design optimization; Equations; Hydrogen; Jamming; Microactuators; Micromechanical devices; Position measurement; MEMS; classificatory; graph; microactuator;
Conference_Titel :
CAD Systems in Microelectronics, 2009. CADSM 2009. 10th International Conference - The Experience of Designing and Application of
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-2191-05-9
