DocumentCode
493273
Title
Hot punching on an 8 inch substrate as an alternative technology to produced holes on a large scale
Author
Rapp, B.E. ; Schneider, M. ; Worgull, M.
Author_Institution
Inst. for Microstruct. Technol., Forschungszentrum Karlsruhe, Eggenstein-Leopoldshafen
fYear
2009
fDate
1-3 April 2009
Firstpage
136
Lastpage
139
Abstract
In this paper, we describe a modification of the classical hot embossing process which is capable of producing holes in polymer substrates. Substrates with holes that penetrate the complete height of the substrate have been a technical challenge since the first description of the hot embossing process. However most components as, e. g., microfluidic components targeted for biomedical applications are in need of such structures. We describe a simple and robust approach which enables the user to produce holes in polymer substrates without the need for elaborate machine equipment or special production technology for molding tools. We call this process hot punching which we demonstrate here to be suitable not only for small scale substrates but also for producing substrates with holes on an 8 inch substrate.
Keywords
embossing; microfluidics; micromachining; polymers; punching; holes; hot embossing; hot punching; microfluidic components; polymer substrate; size 8 inch; Embossing; Fatigue; Internal stresses; Large-scale systems; Microstructure; Nonhomogeneous media; Polymers; Punching; Scanning electron microscopy; Solids;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location
Rome
Print_ISBN
978-1-4244-3874-7
Type
conf
Filename
4919477
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