• DocumentCode
    493273
  • Title

    Hot punching on an 8 inch substrate as an alternative technology to produced holes on a large scale

  • Author

    Rapp, B.E. ; Schneider, M. ; Worgull, M.

  • Author_Institution
    Inst. for Microstruct. Technol., Forschungszentrum Karlsruhe, Eggenstein-Leopoldshafen
  • fYear
    2009
  • fDate
    1-3 April 2009
  • Firstpage
    136
  • Lastpage
    139
  • Abstract
    In this paper, we describe a modification of the classical hot embossing process which is capable of producing holes in polymer substrates. Substrates with holes that penetrate the complete height of the substrate have been a technical challenge since the first description of the hot embossing process. However most components as, e. g., microfluidic components targeted for biomedical applications are in need of such structures. We describe a simple and robust approach which enables the user to produce holes in polymer substrates without the need for elaborate machine equipment or special production technology for molding tools. We call this process hot punching which we demonstrate here to be suitable not only for small scale substrates but also for producing substrates with holes on an 8 inch substrate.
  • Keywords
    embossing; microfluidics; micromachining; polymers; punching; holes; hot embossing; hot punching; microfluidic components; polymer substrate; size 8 inch; Embossing; Fatigue; Internal stresses; Large-scale systems; Microstructure; Nonhomogeneous media; Polymers; Punching; Scanning electron microscopy; Solids;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-3874-7
  • Type

    conf

  • Filename
    4919477