DocumentCode
493291
Title
A clover shaped silicon piezoresistive microphone for miniaturiz Photoacoustic Gas sensors
Author
Grinde, C. ; Ohlckers, P. ; Mielnik, M. ; Jensen, G.U. ; Ferber, A. ; Wang, D.T.
Author_Institution
Vestfold Univ. Coll., Tonsberg
fYear
2009
fDate
1-3 April 2009
Firstpage
256
Lastpage
260
Abstract
Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of multiple thickness.
Keywords
elemental semiconductors; gas sensors; microphones; piezoresistive devices; silicon; DRIE etch; Si; miniaturized photoacoustic gas sensors; piezoresistive microphone; Gas detectors; Microphones; Piezoresistance; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location
Rome
Print_ISBN
978-1-4244-3874-7
Type
conf
Filename
4919495
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