Title :
Lumped modeling of a novel RF MEMS double-disk resonator system
Author :
Grinde, C. ; Nygaard, K.H. ; Due-Hansen, J. ; Fjeldly, T.A.
Author_Institution :
Vestfold Univ. Coll., Tonsberg
Abstract :
We present the design and modeling of a novel RF MEMS device using vertically coupled disk resonators. Analytic models have been developed describing the frequency separation, and expressions for parameter extraction for use in equivalent circuits. The models have been verified using a finite element analysis.
Keywords :
equivalent circuits; finite element analysis; lumped parameter networks; micromechanical resonators; RF MEMS double-disk resonator system; equivalent circuits; finite element analysis; frequency separation; lumped modeling; Coupling circuits; Educational institutions; Electrodes; Equivalent circuits; Finite element methods; Frequency; Implants; Parameter extraction; Radiofrequency microelectromechanical systems; Resonator filters;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
