DocumentCode
493295
Title
Lumped modeling of a novel RF MEMS double-disk resonator system
Author
Grinde, C. ; Nygaard, K.H. ; Due-Hansen, J. ; Fjeldly, T.A.
Author_Institution
Vestfold Univ. Coll., Tonsberg
fYear
2009
fDate
1-3 April 2009
Firstpage
14
Lastpage
18
Abstract
We present the design and modeling of a novel RF MEMS device using vertically coupled disk resonators. Analytic models have been developed describing the frequency separation, and expressions for parameter extraction for use in equivalent circuits. The models have been verified using a finite element analysis.
Keywords
equivalent circuits; finite element analysis; lumped parameter networks; micromechanical resonators; RF MEMS double-disk resonator system; equivalent circuits; finite element analysis; frequency separation; lumped modeling; Coupling circuits; Educational institutions; Electrodes; Equivalent circuits; Finite element methods; Frequency; Implants; Parameter extraction; Radiofrequency microelectromechanical systems; Resonator filters;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location
Rome
Print_ISBN
978-1-4244-3874-7
Type
conf
Filename
4919499
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