DocumentCode
493296
Title
What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection
Author
Zähringer, Sandy ; Schwesinger, Norbert
Author_Institution
Fachgebiet fur Mikrostrukurierte Mechatronische Syst., Tech. Univ. Munchen, Munich
fYear
2009
fDate
1-3 April 2009
Firstpage
394
Lastpage
397
Abstract
This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common bimorph structures with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator and deflectable membrane.
Keywords
electrodes; membranes; micromechanical devices; piezoelectric actuators; bimorph structures; electrode layouts; forward bias; one-side-actuated piezoelectric membrane; one-side-actuated piezoelectric membranes; one-side-actuated piezoelectric micro drives; piezoelectric substrate functions; upward deflection; Assembly; Biomembranes; Ceramics; Contacts; Electrodes; Forward contracts; Piezoelectric actuators; Piezoelectric effect; Piezoelectric polarization; Turning;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location
Rome
Print_ISBN
978-1-4244-3874-7
Type
conf
Filename
4919500
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