DocumentCode
493306
Title
Evaluation of a microfluidic sensor fabricated on polymeric material
Author
Petropoulos, A. ; Kontakis, K. ; Kaltsas, G. ; Gogolides, E.
Author_Institution
Inst. of Microelectron. NCSR Demokritos, Athens
fYear
2009
fDate
1-3 April 2009
Firstpage
398
Lastpage
401
Abstract
The detailed evaluation of a PCB-based microfluidic sensor directly integrated on a polymeric microchannel is presented in this work. The sensor consists mainly of polymeric materials, therefore the operational characteristics are enhanced due to the high level of thermal isolation. The maximum measurement range was 0-400 mul/min which occurs in hot-wire operation, while under the calorimetric operating principle a minimum detectable flow rate of 250 nl/min and a maximum sensitivity of 2.1middot10-3 (mul/min)-1 were recorded. The custom definition of the measurement range is feasible by adjusting the geometry of the microchannel crossection.
Keywords
calorimetry; fluidic devices; microchannel flow; microsensors; polymers; PCB; calorimetry; microchannel cross-section; microfluidic sensor; polymeric material; polymeric microchannel; sensitivity; thermal isolation; Fabrication; Geometry; Heating; Microchannel; Microfluidics; Polymers; Sensor phenomena and characterization; Thermal conductivity; Thermal sensors; Thermistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location
Rome
Print_ISBN
978-1-4244-3874-7
Type
conf
Filename
4919510
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