DocumentCode :
493306
Title :
Evaluation of a microfluidic sensor fabricated on polymeric material
Author :
Petropoulos, A. ; Kontakis, K. ; Kaltsas, G. ; Gogolides, E.
Author_Institution :
Inst. of Microelectron. NCSR Demokritos, Athens
fYear :
2009
fDate :
1-3 April 2009
Firstpage :
398
Lastpage :
401
Abstract :
The detailed evaluation of a PCB-based microfluidic sensor directly integrated on a polymeric microchannel is presented in this work. The sensor consists mainly of polymeric materials, therefore the operational characteristics are enhanced due to the high level of thermal isolation. The maximum measurement range was 0-400 mul/min which occurs in hot-wire operation, while under the calorimetric operating principle a minimum detectable flow rate of 250 nl/min and a maximum sensitivity of 2.1middot10-3 (mul/min)-1 were recorded. The custom definition of the measurement range is feasible by adjusting the geometry of the microchannel crossection.
Keywords :
calorimetry; fluidic devices; microchannel flow; microsensors; polymers; PCB; calorimetry; microchannel cross-section; microfluidic sensor; polymeric material; polymeric microchannel; sensitivity; thermal isolation; Fabrication; Geometry; Heating; Microchannel; Microfluidics; Polymers; Sensor phenomena and characterization; Thermal conductivity; Thermal sensors; Thermistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
Type :
conf
Filename :
4919510
Link To Document :
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