• DocumentCode
    493306
  • Title

    Evaluation of a microfluidic sensor fabricated on polymeric material

  • Author

    Petropoulos, A. ; Kontakis, K. ; Kaltsas, G. ; Gogolides, E.

  • Author_Institution
    Inst. of Microelectron. NCSR Demokritos, Athens
  • fYear
    2009
  • fDate
    1-3 April 2009
  • Firstpage
    398
  • Lastpage
    401
  • Abstract
    The detailed evaluation of a PCB-based microfluidic sensor directly integrated on a polymeric microchannel is presented in this work. The sensor consists mainly of polymeric materials, therefore the operational characteristics are enhanced due to the high level of thermal isolation. The maximum measurement range was 0-400 mul/min which occurs in hot-wire operation, while under the calorimetric operating principle a minimum detectable flow rate of 250 nl/min and a maximum sensitivity of 2.1middot10-3 (mul/min)-1 were recorded. The custom definition of the measurement range is feasible by adjusting the geometry of the microchannel crossection.
  • Keywords
    calorimetry; fluidic devices; microchannel flow; microsensors; polymers; PCB; calorimetry; microchannel cross-section; microfluidic sensor; polymeric material; polymeric microchannel; sensitivity; thermal isolation; Fabrication; Geometry; Heating; Microchannel; Microfluidics; Polymers; Sensor phenomena and characterization; Thermal conductivity; Thermal sensors; Thermistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-3874-7
  • Type

    conf

  • Filename
    4919510