Optimal design analysis of electrothermal microactuators

This paper explores a comparative study between different designs of electrothermal microactuators with emphasis on optimal design and performance key factors. For this purpose, two typical designs for electrothermal microactuators are studied: one with different beam lengths (design A), other one with different beam sections and a flexure part (design B). Analytical model has been developed and validated by comparison of simulation results with experimental results in literature. Optimal geometrical dimensions to achieve maximum deflection have been investigated using genetic algorithm. Temperature distribution, power consumption and deflection of these microactuators have been compared in rang of functionality. The results demonstrate that design B generates larger deflection and design A consumes lower power. Also, design B is more flexible and sensitive to geometrical dimension variation. Using optimal geometrical dimensions, deflection of design B becomes more than twice.