DocumentCode
493331
Title
Replica molding of polymeric components for microsystems
Author
Obreja, Paula ; Cristea, Dana ; Dinescu, Adrian ; Gavrila, Raluca
Author_Institution
Dev. in Microtechnologies, Nat. Inst. for Res., Bucharest
fYear
2009
fDate
1-3 April 2009
Firstpage
349
Lastpage
352
Abstract
The paper presents the replicas for various patterns (dots, lines, prism and lens) obtained in polymethylmethacrylate (PMMA), epoxy resin and polydimethylsiloxane (PDMS) in different conditions for polymer coating. By properly understanding of the all factors affecting the process, we follow to improve the quality of the replicas and to apply the replica molding in micro/nanofabrication of the components for microsystems.
Keywords
microfabrication; micromechanical devices; moulding; nanofabrication; polymer films; replica techniques; epoxy resin; microfabrication; microsystems; nanofabrication; polydimethylsiloxane; polymer coating; polymeric components; polymethylmethacrylate; replica molding; Atomic force microscopy; Curing; Electron optics; Epoxy resins; Optical materials; Optical microscopy; Optical polymers; Polymer films; Silicon; Soft lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location
Rome
Print_ISBN
978-1-4244-3874-7
Type
conf
Filename
4919536
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