Title :
Replica molding of polymeric components for microsystems
Author :
Obreja, Paula ; Cristea, Dana ; Dinescu, Adrian ; Gavrila, Raluca
Author_Institution :
Dev. in Microtechnologies, Nat. Inst. for Res., Bucharest
Abstract :
The paper presents the replicas for various patterns (dots, lines, prism and lens) obtained in polymethylmethacrylate (PMMA), epoxy resin and polydimethylsiloxane (PDMS) in different conditions for polymer coating. By properly understanding of the all factors affecting the process, we follow to improve the quality of the replicas and to apply the replica molding in micro/nanofabrication of the components for microsystems.
Keywords :
microfabrication; micromechanical devices; moulding; nanofabrication; polymer films; replica techniques; epoxy resin; microfabrication; microsystems; nanofabrication; polydimethylsiloxane; polymer coating; polymeric components; polymethylmethacrylate; replica molding; Atomic force microscopy; Curing; Electron optics; Epoxy resins; Optical materials; Optical microscopy; Optical polymers; Polymer films; Silicon; Soft lithography;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
