Multidomain simulations of silicon sensors with usage of ANSYS and SUGAR software

Author

Szermer, Michal ; Napieralski, Andrzej

Author_Institution

Dept. of Microelectron. & Comput. Sci., Tech. Univ. of Lodz, Lodz

fYear

2009

fDate

22-24 April 2009

Firstpage

110

Lastpage

112

Abstract

In this paper the multidomain simulations of silicon sensors are presented. Authors on the basis of electro-thermal converter show the idea of operation basic structure made by silicon. All structures were simulated in ANSYS and SUGAR software. They allow checking the behavior of such sensors as electro-thermal converter, silicon micromirror, comb-drive resonator, etc. Simulation results are valuable and necessary to proper design the sensors that could be made in one of the available micromachine technology.

Keywords

convertors; finite element analysis; microsensors; silicon; thermal analysis; ANSYS; SUGAR; Si; electro-thermal converter; micromachine technology; microsensor; multidomain simulation; silicon sensor; thermal simulation; Computer science; Mechanical sensors; Microelectronics; Micromechanical devices; Micromirrors; Resistors; Sensor systems; Silicon; Temperature sensors; Thermal sensors; ANSYS; Electro-thermal Converter; MEMS Sensors; SUGAR; Silicon micromirror;

fLanguage

English

Publisher

ieee

Conference_Titel

Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on

Conference_Location

Zakarpattya

Print_ISBN

978-966-2191-06-6

Type

conf

Filename

5069723