Title :
Multidomain simulations of silicon sensors with usage of ANSYS and SUGAR software
Author :
Szermer, Michal ; Napieralski, Andrzej
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Tech. Univ. of Lodz, Lodz
Abstract :
In this paper the multidomain simulations of silicon sensors are presented. Authors on the basis of electro-thermal converter show the idea of operation basic structure made by silicon. All structures were simulated in ANSYS and SUGAR software. They allow checking the behavior of such sensors as electro-thermal converter, silicon micromirror, comb-drive resonator, etc. Simulation results are valuable and necessary to proper design the sensors that could be made in one of the available micromachine technology.
Keywords :
convertors; finite element analysis; microsensors; silicon; thermal analysis; ANSYS; SUGAR; Si; electro-thermal converter; micromachine technology; microsensor; multidomain simulation; silicon sensor; thermal simulation; Computer science; Mechanical sensors; Microelectronics; Micromechanical devices; Micromirrors; Resistors; Sensor systems; Silicon; Temperature sensors; Thermal sensors; ANSYS; Electro-thermal Converter; MEMS Sensors; SUGAR; Silicon micromirror;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on
Conference_Location :
Zakarpattya
Print_ISBN :
978-966-2191-06-6
