Title :
Overview and analysis of readout circuits for capacitive sensing in MEMS gyroscopes (MEMS angular velocity sensors)
Author :
Lobur, Mykhaylo ; Holovatyy, Andriy
Author_Institution :
Dept. of CAD, Lviv Polytech. Nat. Univ., Lviv
Abstract :
In the article, overview and analysis of the performance of capacitive sensing circuits for MEMS gyroscopes are presented. Their performance, advantages and disadvantages are given. The low-noise chopper stabilized readout circuit for capacitive measurements in MEMS gyroscopes is proposed.
Keywords :
angular velocity measurement; capacitance measurement; capacitive sensors; circuit stability; gyroscopes; microsensors; readout electronics; MEMS angular velocity sensor; MEMS gyroscope; capacitive measurement; capacitive sensing circuit; low-noise chopper stabilized readout circuit; Angular velocity; Capacitive sensors; Capacitors; Circuit analysis; Circuit noise; Gyroscopes; Micromechanical devices; Noise level; Noise reduction; Voltage; MEMS (MicroElectroMechanical Systems); MEMS gyroscope; capacitive sensing circuit; chopper stabilized capacitive readout amplifier; continous-time voltage sensing; continuous-time current-mode capacitive sensing; continuous-time voltage-mode capacitive sensing; switched-capacitor charge integrator for capacitive sensing;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on
Conference_Location :
Zakarpattya
Print_ISBN :
978-966-2191-06-6
