Opto-μECoG Array: A Hybrid Neural Interface With Transparent μECoG Electrode Array and Integrated LEDs for Optogenetics

Electrocorticogram (ECoG) recordings, taken from electrodes placed on the surface of the cortex, have been successfully implemented for control of brain machine interfaces (BMIs). Optogenetics, direct optical stimulation of neurons in brain tissue genetically modified to express channelrhodopsin-2 (ChR2), enables targeting of specific types of neurons with sub-millisecond temporal precision. In this work, we developed a BMI device, called an Opto- μECoG array, which combines ECoG recording and optogenetics-based stimulation to enable multichannel, bi-directional interactions with neurons. The Opto- μECoG array comprises two sub-arrays, each containing a 4 × 4 distribution of micro-epidural transparent electrodes (~200 μm diameter) and embedded light-emitting diodes (LEDs) for optical neural stimulation on a 2.5×2.5 mm² footprint to match the bilateral hemispherical area of the visual cortex in a rat. The transparent electrodes were fabricated with indium tin oxide (ITO). Parylene-C served as the main structural and packaging material for flexibility and biocompatibility. Optical, electrical, and thermal characteristics of the fabricated device were investigated and in vivo experiments were performed to evaluate the efficacy of the device.