Title :
Temperature-compensated BAW orientations over 500°C on LGT for frequency control and sensor applications
Author :
Davulis, Peter ; da Cunha, M. Pereira
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Maine, Orono, ME, USA
Abstract :
Recently extracted langatate (LGT) elastic, piezoelectric and dielectric constants up to 900°C were utilised to predict the temperature coefficient of frequency (TCF) of bulk acoustic wave (BAW) orientations. A range of LGT BAW orientations were identified with turnover temperatures between 100 and 550°C for use in high-temperature sensor and frequency control applications. In addition, the piezoelectric coupling of the identified orientations was investigated to determine the preferred cuts for high-temperature operation.
Keywords :
bulk acoustic wave devices; frequency control; permittivity; temperature sensors; LGT; bulk acoustic wave orientations; dielectric constants; extracted langatate elastic; frequency control; high-temperature sensor; piezoelectric constants; piezoelectric coupling; temperature coefficient of frequency; temperature-compensated BAW orientations; turnover temperatures;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2012.3699
