DocumentCode :
497180
Title :
New experimental insight into ballisticity of transport in strained bulk MOSFETs
Author :
Fleury, D. ; Bidal, G. ; Cros, A. ; Boeuf, F. ; Skotnicki, T. ; Ghibaudo, G.
Author_Institution :
STMicroelectronics, Crolles, France
fYear :
2009
fDate :
16-18 June 2009
Firstpage :
16
Lastpage :
17
Abstract :
This paper proposes a new expression unifying all transport mechanisms (drift-diffusion, velocity-saturation and quasi-ballistic). This enables an experimental extraction of the limiting velocity and also, for the first time, a determination of its nature (thermal injection or velocity saturation). We show that the observed increase in the limiting velocity in short and strained devices was confusingly interpreted as an evidence of increasing ballisticity. At least down to 20 nm channel length, the transport remains velocity-saturation limited. However, the good news we confirm experimentally is that Vsat increases itself in short and strained devices. This promises an increase in Ion, even if the nature of the transport is velocity-saturated. This new findings open doors for the study and optimization of transport in advanced CMOS technologies.
Keywords :
CMOS integrated circuits; MOSFET; CMOS; drift-diffusion; quasi-ballistic; size 20 nm; strained bulk MOSFET; thermal injection; transport ballisticity; transport mechanisms; velocity-saturation; Backscatter; CMOS technology; Doping; MOSFETs; Performance evaluation; Scattering; Temperature dependence; Temperature distribution; Temperature measurement; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 2009 Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-3308-7
Type :
conf
Filename :
5200617
Link To Document :
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