Flexural Mechanism Design Analysis for a New Piezoelectric Inchworm Actuator

This paper presents a new proof-of-concept design of inchworm-type piezoelectric actuator for precision positioner which avoids the tight tolerance and could be easily assembled. The proposed design uses two parallel linear guiding rods as a guide different from the previous configurations which adopted a guide channel or a moving shaft and the clamping clearance is adjustable. For the optimum design analysis of the clamp and extension flexures, their design equations were developed. They facilitate quick iteration and convergence to an acceptable design based on the requirements. The accuracy of the equations was assessed by comparing them to finite element analysis (FEA) results. Future research will include prototype tests to validate both the analytical and finite element models.