DocumentCode
499033
Title
Control system of single-crystal growth with an invariable diameter based on parameter self-adjusting fuzzy control
Author
Liu, Shu-guang ; Sun, Xing-li
Author_Institution
Xi´´an Polytech. Univ., Xi´´an, China
Volume
1
fYear
2009
fDate
12-15 July 2009
Firstpage
606
Lastpage
610
Abstract
Automatic diameter control (ADC) is an important procedure in the Czochralski pulling. Crystal growth control system with an invariable diameter lacks a precise mathematical model, and has nonlinear and time-varying characteristics. For tacking above problems, fuzzy control strategy has been proposed in this paper. To enhance control accuracy and disturbance resisting ability, fuzzy-PI controller for the parameter self-adjusting has been adopted in this system. The results of experiment show that this controller can make the warp unwinding tension be automatically-controlled efficiently, and has higher control accuracy, better disturbance-resisting ability, less sensitive to parameter changes, and better robustness.
Keywords
PI control; crystal growth from melt; elemental semiconductors; fuzzy control; nonlinear control systems; particle size; robust control; self-adjusting systems; semiconductor growth; silicon; time-varying systems; Czochralski pulling; Si; automatic diameter control; crystal growth control system; disturbance-resisting ability; fuzzy-PI controller; mathematical model; nonlinear characteristics; parameter self-adjusting; parameter self-adjusting fuzzy control; single-crystal growth; time-varying characteristics; warp unwinding tension; Automatic control; Control systems; Cooling; Crystalline materials; Crystallization; Fuzzy control; Liquid crystals; Shape control; Silicon; Temperature control; Crystal growth; Crystal puller; Fuzzy control;
fLanguage
English
Publisher
ieee
Conference_Titel
Machine Learning and Cybernetics, 2009 International Conference on
Conference_Location
Baoding
Print_ISBN
978-1-4244-3702-3
Electronic_ISBN
978-1-4244-3703-0
Type
conf
DOI
10.1109/ICMLC.2009.5212491
Filename
5212491
Link To Document