• DocumentCode
    499033
  • Title

    Control system of single-crystal growth with an invariable diameter based on parameter self-adjusting fuzzy control

  • Author

    Liu, Shu-guang ; Sun, Xing-li

  • Author_Institution
    Xi´´an Polytech. Univ., Xi´´an, China
  • Volume
    1
  • fYear
    2009
  • fDate
    12-15 July 2009
  • Firstpage
    606
  • Lastpage
    610
  • Abstract
    Automatic diameter control (ADC) is an important procedure in the Czochralski pulling. Crystal growth control system with an invariable diameter lacks a precise mathematical model, and has nonlinear and time-varying characteristics. For tacking above problems, fuzzy control strategy has been proposed in this paper. To enhance control accuracy and disturbance resisting ability, fuzzy-PI controller for the parameter self-adjusting has been adopted in this system. The results of experiment show that this controller can make the warp unwinding tension be automatically-controlled efficiently, and has higher control accuracy, better disturbance-resisting ability, less sensitive to parameter changes, and better robustness.
  • Keywords
    PI control; crystal growth from melt; elemental semiconductors; fuzzy control; nonlinear control systems; particle size; robust control; self-adjusting systems; semiconductor growth; silicon; time-varying systems; Czochralski pulling; Si; automatic diameter control; crystal growth control system; disturbance-resisting ability; fuzzy-PI controller; mathematical model; nonlinear characteristics; parameter self-adjusting; parameter self-adjusting fuzzy control; single-crystal growth; time-varying characteristics; warp unwinding tension; Automatic control; Control systems; Cooling; Crystalline materials; Crystallization; Fuzzy control; Liquid crystals; Shape control; Silicon; Temperature control; Crystal growth; Crystal puller; Fuzzy control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Machine Learning and Cybernetics, 2009 International Conference on
  • Conference_Location
    Baoding
  • Print_ISBN
    978-1-4244-3702-3
  • Electronic_ISBN
    978-1-4244-3703-0
  • Type

    conf

  • DOI
    10.1109/ICMLC.2009.5212491
  • Filename
    5212491