Title :
High resolution imaging of optical modes in silicon microdisk cavities based on near-field perturbation
Author :
Eftekhar, Ali Asghar ; Soltani, Mohammad ; Yegnanarayanan, Siva ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We demonstrate high resolution near-field imaging of the optical modes profile in high Q silicon microdisks. A spatial resolution of ~20 nm is obtained by characterizing the perturbative effects of a scanning AFM tip on the microdisk transmission.
Keywords :
atomic force microscopy; imaging; integrated optics; lattice dynamics; microcavities; high resolution near-field imaging; microdisk transmission; near-field perturbation; optical modes; perturbative effects; scanning AFM; silicon microdisk cavities; High-resolution imaging; Nonlinear optics; Optical coupling; Optical microscopy; Optical resonators; Optical scattering; Optical sensors; Optical surface waves; Optical waveguides; Silicon; (130.3120) Integrated optics devices; (180.4243) Near-field microscopy;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
