Title :
Frequency scanning laser for high speed phase shifting interferometry
Author :
Jang, Roma ; Kim, Jae Wan ; Kang, Chu-Shik ; Kim, Jong-Ahn ; Eom, Tae Bong ; Kim, Jae-Eun ; Park, Hae Yong
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Abstract :
A Multichannel frequency scanning laser which is to be used as a source in a high speed phase-shifting interferometer to measure 3D profiles of nanostructures is presented.
Keywords :
nanostructured materials; phase shifting interferometry; 3D profiles; frequency scanning laser; high speed phase shifting interferometry; nanostructures; Frequency measurement; Frequency modulation; High speed optical techniques; Laser mode locking; Length measurement; Optical interferometry; Phase measurement; Phase shifting interferometry; Resonant frequency; Velocity measurement; (120.3180 ) Interferometry; (120.6660 ) Surface measurements, roughness;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
