Title :
High quality factor 1D photonic crystal cavities in silicon
Author :
Deotare, Parag B. ; McCutcheon, Murray W. ; Frank, Ian W. ; Khan, Mughees ; Shankar, Raji ; Loncar, Marko
Author_Institution :
Sch. of Eng. & Appl. Sci., Harvard Univ., Cambridge, MA, USA
Abstract :
Using a tapered photonic crystal cavity approach we designed cavities with theoretical Quality factors Q=2times107 and measured experimental Q=7.5times105. Non-linear broadening of the cavity resonance has also been observed.
Keywords :
Q-factor; microcavities; optical design techniques; photonic crystals; 1D photonic crystal cavities; cavity resonance; non-linear broadening; quality factor; Etching; Light scattering; Optical devices; Optical scattering; Particle scattering; Photonic crystals; Q factor; Q measurement; Resonance light scattering; Silicon on insulator technology; (230.0230) Optical Devices; (230.5298) Photonic Crystals;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8