DocumentCode
499797
Title
Tip assisted laser induced surface nanolithograpjhy
Author
Milner, Alexander A. ; Prior, Yehiam
Author_Institution
Dept. of Chem. Phys., Weizmann Inst. of Sci., Rehovot, Israel
fYear
2009
fDate
2-4 June 2009
Firstpage
1
Lastpage
2
Abstract
Novel mode of AFM operation is demonstrated to be efficient for non-contact laser induced nano-lithography on the surface of polymers and of metals by means of two different mechanisms: localized heat transfer and electro-magnetic field enhancement.
Keywords
atomic force microscopy; laser materials processing; nanolithography; atomic force microscopy; electromagnetic field enhancement; localized heat transfer; surface nanolithography; tip assisted laser; Atom lasers; Atomic force microscopy; Chemical lasers; Gold; Laser modes; Laser theory; Nanolithography; Polymer films; Surface emitting lasers; Ultrafast optics; (140.3390) Laser materials processing; 180.4243 Near-field microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-869-8
Electronic_ISBN
978-1-55752-869-8
Type
conf
Filename
5225157
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