Title :
Tip assisted laser induced surface nanolithograpjhy
Author :
Milner, Alexander A. ; Prior, Yehiam
Author_Institution :
Dept. of Chem. Phys., Weizmann Inst. of Sci., Rehovot, Israel
Abstract :
Novel mode of AFM operation is demonstrated to be efficient for non-contact laser induced nano-lithography on the surface of polymers and of metals by means of two different mechanisms: localized heat transfer and electro-magnetic field enhancement.
Keywords :
atomic force microscopy; laser materials processing; nanolithography; atomic force microscopy; electromagnetic field enhancement; localized heat transfer; surface nanolithography; tip assisted laser; Atom lasers; Atomic force microscopy; Chemical lasers; Gold; Laser modes; Laser theory; Nanolithography; Polymer films; Surface emitting lasers; Ultrafast optics; (140.3390) Laser materials processing; 180.4243 Near-field microscopy;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
