Title :
Low loss etchless silicon photonic waveguides
Author :
Cardenas, Jaime ; Poitras, Carl B. ; Robinson, Jacob T. ; Preston, Kyle ; Chen, Long ; Lipson, Michal
Author_Institution :
Dept. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate low loss silicon waveguides fabricated without silicon etching by selective oxidation. We show propagation losses of 0.3dB/cm (lambda=1.55 mum), roughness of 0.3 nm RMS, and 0.0002 dB loss for a 90deg bend with 20 mum bending radius.
Keywords :
elemental semiconductors; optical fabrication; optical losses; optical waveguides; silicon; Si; loss 0.0002 dB; low-loss silicon photonic waveguide fabrication; propagation loss; selective oxidation; silicon etching; wavelength 1.55 mum; Etching; Optical losses; Optical waveguides; Oxidation; Plasma applications; Plasma chemistry; Propagation losses; Silicon; Slabs; Tellurium; (230.7370) Waveguides; (250.5300) Photonic integrated circuits;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
