Title :
Optimization of metallic micro-heaters for reconfigurable silicon photonics
Author :
Atabaki, Amir H. ; Soltani, Mohammad ; Yegnanarayanan, Siva ; Eftekhar, Ali A. ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Integration of silicon microresonators with metallic micro-heaters optimized for low power consumption and fast reconfigurability is experimentally demonstrated. It is shown that narrower heaters improve the performance and also LPCVD SiN over-cladding enhances tuning speed.
Keywords :
integrated optics; low-power electronics; microcavity lasers; silicon compounds; LPCVD; fast reconfigurability; low power consumption; metallic micro-heaters; reconfigurable silicon photonics; silicon microresonators; Heat transfer; Optical fiber polarization; Optical materials; Optical resonators; Optical tuning; Optical waveguides; Photonics; Resonance; Silicon compounds; Temperature; (130.3130) Integrated optics materials; (160.6840) Thermo-optical materials; (230.5750) Resonators;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8