• DocumentCode
    500412
  • Title

    Atomic nanofabrication of periodic structures

  • Author

    Allred, Claire ; Reeves, Jason ; Corder, Christopher ; Metcalf, Harold

  • Author_Institution
    Dept. of Phys. & Astron., Stony Brook Univ., Stony Brook, NY, USA
  • fYear
    2009
  • fDate
    2-4 June 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Metastable helium has 20 eV of internal energy that destroys a resist assembled on a wafer. An optical standing wave was used to channel and focus the He* atoms into lines separated by lambda /2.
  • Keywords
    helium; metamaterials; nanofabrication; photoresists; atomic nanofabrication; electron volt energy 20 eV; metastable helium; optical standing wave; periodic structures; resist assembled on a wafer; Atom optics; Atomic beams; Atomic layer deposition; Atomic measurements; Etching; Helium; Metastasis; Nanofabrication; Periodic structures; Resists; 020.3320; 160.4236;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-869-8
  • Electronic_ISBN
    978-1-55752-869-8
  • Type

    conf

  • Filename
    5225805
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=500412