Title :
Planar integration of a long range surface plasmon waveguide with an inverted metal-semiconductor-metal photodetector on silicon
Author :
Dhar, Sulochana ; Degiron, Aloyse ; Smith, David R. ; Jokerst, Nan M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA
Abstract :
A long range surface plasmon polariton (LR-SPP) insulator-metal-insulator waveguide was integrated with a thin film InxGa1-xAs-based photodetector (PD) on silicon for planar detection of LR-SPPs, and demonstrated coupling from the LR-SPP to the PD.
Keywords :
III-V semiconductors; elemental semiconductors; gallium arsenide; indium compounds; metal-semiconductor-metal structures; optical planar waveguides; photodetectors; plasmonics; semiconductor thin films; silicon; surface plasmons; thin film devices; InxGa1-xAs; Si; insulator-metal-insulator waveguide; inverted metal-semiconductor-metal photodetector; long range surface plasmon waveguide; planar integration; surface plasmon polariton; thin film photodetector; Bonding; Etching; Optical fiber polarization; Optical surface waves; Optical waveguides; Photodetectors; Planar waveguides; Plasmons; Silicon; Surface waves; (130.3120) Integrated optics devices; (250.5403) Plasmonics;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
