Phase tunable holographic lithography using a single optical element

Author

Xu, Di ; Chen, Kevin ; Harb, Ahmad ; Rodriguez, Daniel ; Lozano, Karen ; Lin, Yuankun

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Pittsburgh, Pittsburgh, PA, USA

fYear

2009

fDate

2-4 June 2009

Firstpage

1

Lastpage

2

Abstract

This paper presents the holographic fabrication of three-dimensional photonic crystal templates by forming a five beam interference pattern using a top-cut prism. The interconnecting of the multi-layer structures was controlled by phase-tuning one interfering beam.

Keywords

holographic optical elements; light interference; optical fabrication; optical multilayers; optical prisms; optical tuning; photolithography; photonic crystals; five beam interference pattern; holographic lithography; multilayer structures; phase tuning; single optical element; three-dimensional photonic crystal templates; top-cut prism; Glass; Holographic optical components; Holography; Interference; Laser beams; Lithography; Optical device fabrication; Optical refraction; Photonic crystals; Resists; (160.5298) Photonic crystal; (220.4000) Microstructure fabrication;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on

Conference_Location

Baltimore, MD

Print_ISBN

978-1-55752-869-8

Electronic_ISBN

978-1-55752-869-8

Type

conf

Filename

5225932