Title :
Phase tunable holographic lithography using a single optical element
Author :
Xu, Di ; Chen, Kevin ; Harb, Ahmad ; Rodriguez, Daniel ; Lozano, Karen ; Lin, Yuankun
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Pittsburgh, Pittsburgh, PA, USA
Abstract :
This paper presents the holographic fabrication of three-dimensional photonic crystal templates by forming a five beam interference pattern using a top-cut prism. The interconnecting of the multi-layer structures was controlled by phase-tuning one interfering beam.
Keywords :
holographic optical elements; light interference; optical fabrication; optical multilayers; optical prisms; optical tuning; photolithography; photonic crystals; five beam interference pattern; holographic lithography; multilayer structures; phase tuning; single optical element; three-dimensional photonic crystal templates; top-cut prism; Glass; Holographic optical components; Holography; Interference; Laser beams; Lithography; Optical device fabrication; Optical refraction; Photonic crystals; Resists; (160.5298) Photonic crystal; (220.4000) Microstructure fabrication;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
