Title :
Towards athermal slotted silicon microring resonators with UV-trimmable PMMA upper-cladding
Author :
Zhou, Linjie ; Okamoto, Katsunari ; Yoo, S.J.B.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, Davis, CA, USA
Abstract :
We demonstrate that PMMA upper cladding on the slotted silicon micoring resonators can reduce the resonance thermal dependence from 91 pm/deg to 27 pm/degC. UV trimming can shift the resonance wavelength 0.5 nm.
Keywords :
claddings; elemental semiconductors; integrated optics; micro-optics; microcavities; optical polymers; optical resonators; silicon; spectral line shift; thermo-optical effects; PMMA upper-cladding; Si; UV-trimmable upper-cladding; athermal microring resonators; resonance thermal dependence; resonance wavelength shift; slotted silicon microring resonators; ultraviolet trimming; Optical filters; Optical interconnections; Optical resonators; Optical waveguides; Photonics; Plasma temperature; Refractive index; Resonance; Scanning electron microscopy; Silicon; (130.7408) Wavelength filtering devices; (230.5750) Resonators;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
