Title :
Flow monitoring in optofluidic channels using planar Bragg gratings
Author :
Holmes, C. ; Gates, J.C. ; Gawith, C.B.E. ; Smith, P.G.R.
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
Abstract :
An integrated pressure/flow sensor using a direct UV written planar Bragg grating situated inside a flexible diaphragm of thickness 200 mum has been fabricated. The diaphragm is created by etching away the underlying silicon support.
Keywords :
Bragg gratings; etching; flow sensors; integrated optics; micro-optomechanical devices; microchannel flow; microfabrication; optical fabrication; pressure sensors; silicon; Si; direct UV written planar Bragg grating; flexible diaphragm fabrication; flow sensor; integrated pressure sensor; optofluidic channel flow monitoring; silicon support etching; size 200 mum; Biosensors; Bragg gratings; Chemical analysis; Chemical sensors; Integrated optics; Microfluidics; Monitoring; Optical sensors; Silicon; Temperature sensors; (130.3120) Integrated Optics Devices; (130.6010) Sensors;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
