Title :
Nanometer-scale machining by laser ablation with a focused extreme ultraviolet laser beam
Author :
Bravo, H. ; Szapiro, B.T. ; Wachulak, P.W. ; Marconi, M.C. ; Chao, W. ; Anderson, E.H. ; Attwood, D.T. ; Menoni, C.S. ; Rocca, J.J.
Author_Institution :
NSF ERC for Extreme Ultraviolet Sci. & Technol., Colorado State Univ., Fort Collins, CO, USA
Abstract :
We report the ablation of 200 nm-top wide (130 nm FWHM) trenches on PMMA photoresist by focusing the extreme ultraviolet output from a table-top capillary discharge laser with a Fresnel zone plate lens.
Keywords :
Fresnel diffraction; laser ablation; laser beam machining; photoresists; Fresnel zone plate lens; PMMA photoresist; extreme ultraviolet output; laser ablation; nanometer-scale machining; table-top capillary discharge laser; ultraviolet laser beam; Argon; Focusing; Gas lasers; Laser ablation; Laser beams; Laser theory; Lenses; Machining; Ultraviolet sources; X-ray lasers; (140.7240) UV, EUV and X-ray lasers; (220.4241) Nanostructure fabrication;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
