Title :
The impact of substrate resistivity on ESD protection devices
Author :
Smedes, T. ; Heringa, A. ; van Zwol, J. ; de Jong, P.C.
Author_Institution :
Philips Semiconductors, Gerstweg 2, 6534 AE Nijmegen, the Netherlands
Abstract :
The substrate resistivity has a serious impact on the behaviour of ESD protection devices. TLP characterisation and failure analysis show that different failure mechanisms occur, depending on the substrate resistivity. The mechanisms leading to these phenomena are explained and the consequences for porting IO designs to other substrate types are discussed.
Keywords :
CMOS technology; Conductivity; Diodes; Electrostatic discharge; Failure analysis; Leakage current; Protection; Silicides; Substrates; Testing;
Conference_Titel :
2002 Electrical Overstress/Electrostatic Discharge Symposium, 2002. EOS/ESD '02.
Conference_Location :
Charlotte, NC, USA
Print_ISBN :
978-1-5853-7040-5
Electronic_ISBN :
978-1-5853-7040-5
