An active control method for vibration isolation of precision equipments

Vibration limits the performance of precision equipments in numerous applications, thus the need to control the vibration to optimize performance has become crucial. This paper presents an active control method for vibration isolation of precision equipments. First, some basic concepts of vibration isolation are summarized and how to select an isolation system is presented. The desired function of isolation system and the weight distribution of supported equipments should be determined. Secondly, some traditional control methods are reviewed, and their disadvantages are analyzed. Then, a simplified active actuator and its working principles are developed; the displacement of isolated equipment is obtained. Finally, two different control strategies are applied in this active actuator, and the responses predicted by the model agreed well with the experimental measurements. The proposed active vibration isolation can offer an excellent method to control excessive vibration in a wide variety of applications.